Kosuke Takenaka

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 9:45 AM

[20a-C204-3] Formation of C-Axis-Oriented Aluminum Nitride Thin Films with Plasma Enhanced Reactive Pulsed DC Magnetron Sputtering

〇Kosuke Takenaka¹, Tomoki Yoshitani¹, Giichiro Uchida¹, Yuichi Setsuhara¹ (1.Osaka Univ.)