Yusuke Hayashi

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 7:30 PM E202 (57-202)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[18p-E202-1~22] 15.4 III-V-group nitride crystals

3:45 PM - 4:00 PM

△ [18p-E202-9] Bowing Control of Sputtered AlN caused by High Temperature Annealing

〇Yusuke Hayashi¹, Kentaro Tanigawa¹, Kanako Shojiki², Hideto Miyake^1,2 (1.Grad. School RIS, Mie Univ., 2.Grad. School Eng., Mie Univ.)