Yuki Kondo

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:00 AM - 11:15 AM

△ [20a-C204-8] Removal of DLC Films by Using Plasma Generated by Two Power Supplies

〇Yuki Kondo¹, Tsuyoshi Tanimoto¹, Toru Harigai¹, Fuminori Yoda¹, Satoshi Degai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Hidenobu Gonda², Yasuhiro Hadano³, Masao Kamiya⁴ (1.Toyohashi Univ. Technol., 2.OSG Coat. Service Co., Ltd., 3.Kojima Ind. Corp., 4.Itoh Opt. Ind. Co., Ltd.)

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