Koudai Ozawa

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:00 AM - 12:30 PM F206 (61-206)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[17a-F206-1~13] 13.3 Insulator technology

9:30 AM - 9:45 AM

[17a-F206-3] The Variation of Charge Redistribution Owing to Deterioration of Si₃N₄ Evaluated by KFM

〇Koudai Ozawa¹, Ryu Hasunuma¹ (1.Univ. of Tsukuba)