Kouta Tatejima

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:45 PM - 6:00 PM C103 (52-103)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[17p-C103-1~13] 6.4 Thin films and New materials

5:30 PM - 5:45 PM

△ [17p-C103-12] Growth condition optimization of MnS buffer layer deposited by RF-sputtering for non-polar AlN film growth

〇(M1)Kouta Tatejima^1,2, Takahiro Nagata², Kejiji Ishibashi³, Kenichirou Takahashi³, Setsu Suzuki³, Atsushi Ogura¹, Toyohiro Chikyow² (1.Meiji Univ., 2.NIMS, 3.COMET.Inc)

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