Kazunori Iga

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[17p-C204-1~20] 8.1 Plasma production and diagnostics

2:45 PM - 3:00 PM

△ [17p-C204-7] Behavior of ion in high power impulse magnetron sputtering plasma using carbon target

〇(M1)Kazunori Iga¹, Akinori Oda², Hiroyuki Kousaka³, Takayuki Ohta¹ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)