Senri Takemura

→ Search for Senri Takemura in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:45 PM - 6:15 PM F206 (61-206)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[17p-F206-1~17] 13.3 Insulator technology

2:15 PM - 2:30 PM

[17p-F206-3] Degradation of surface flatness and change of oxidation mechanism during Ge oxidation

〇Senri Takemura¹, Shigehisa Shibayama¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)