Masato Ohmori

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[17p-P12-1~27] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[17p-P12-14] The DLTS studies of inductively coupled plasma-induced damages of n-type GaN

〇Masato Ohmori¹, Sinji Yamada^1,2, Hideki Sakurai^1,2, Yamato Osada², Ryuichiro Kamimura², Jun Suda¹, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.ULVAC ISET)

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