TRUYEN XUAN NGUYEN

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[17p-P12-1~27] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[17p-P12-9] Remote Oxygen/Helium Plasma Enhanced CVD of SiO₂ on GaN(0001) –
Difference from Remote Oxygen/Argon Plasma Enhanced CVD

〇TRUYEN XUAN NGUYEN^1,2, Noriyuki Taoka², Akio Ohta¹, Hisashi Yamada², Tokio Takahashi², Mitsuhisa Ikeda¹, Katsunori Makihara¹, Mitsuaki Shimizu², Seiichi Miyazaki¹ (1.Nagoya Univ., 2.AIST GaN-OIL)