Masaharu Shiratani

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 9:00 AM - 10:15 AM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.6 Plasma Electronics English Session

[18a-C204-1~5] 8.6 Plasma Electronics English Session

10:00 AM - 10:15 AM

▲ [18a-C204-5] Filtering of clusters with cluster cloud in CVD plasmas

〇Masaharu Shiratani¹, Takashi Kojima¹, Susumu Toko¹, Kazuma Tanaka¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori Koga¹ (1.Kyushu Univ.)