Shinji Yamada

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 9:00 AM - 12:15 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18a-C302-1~12] 13.7 Compound and power electron devices and process technology

11:45 AM - 12:00 PM

[18a-C302-11] Control of plasma-induced damage of n-type GaN treated by multistep ICP-RIE

〇Shinji Yamada^1,2, Hideki Sakurai^1,2,3, Masato Omori¹, Jun Suda^1,3, Yamato Osada², Ryuichiro Kamimura², Tatsuya Oyobiki⁴, Tamotsu Hashizume^1,4, Tetsu Kachi¹ (1.Nagoya Univ. ImaSS, 2.ULVAC ISET, 3.Nagoya Univ., 4.Hokkaido Univ. RCIQE)

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