Yuta Nagai

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 9:00 AM - 11:45 AM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[18a-D103-1~10] 15.7 Crystal characterization, impurities and crystal defects

9:45 AM - 10:00 AM

[18a-D103-4] Impact of CO Generation during Melting Process on Carbon Concentration in Czochralski Silicon

〇Yuta Nagai¹, Hiroyuki Tsubota¹, Hisashi Matsumura¹ (1.GlobalWafers Japan)