Takao Abe

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 9:00 AM - 11:45 AM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[18a-D103-1~10] 15.7 Crystal characterization, impurities and crystal defects

10:00 AM - 10:15 AM

[18a-D103-5] Interstitial generation mechanism during CZ silicon growth using cooling type hot zone (Ⅰ)

〇Takao Abe¹, Toru Takahashi¹, Koun Shirai² (1.ShinEtsu Handotai, 2.ISIR, Osaka Univ.)

10:15 AM - 10:30 AM

[18a-D103-6] Interstitial generation mechanism during CZ silicon crystal growth using mild cooling type hot zone (Ⅱ)

〇Takao Abe¹, Toru Takahashi¹, Koun Shirai² (1.ShinEtsu Handotai, 2.ISIR, Osaka Univ.)