KUMIKO YOKOTA

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 9:30 AM - 11:30 AM P3 (P)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication（Poster）

[18a-P3-1~14] 7 Beam Technology and Nanofabrication（Poster）

9:30 AM - 11:30 AM

[18a-P3-12] One-nozzle two-hyperthermal beam system using thin PSVs

〇KUMIKO YOKOTA¹, TEPPEI SHIMIZU¹, RYOTA OKURA¹, YUSUKE FUJIMOTO¹, KAZUKI KITA¹, CHEE SZE KEAT², MINORU IWATA³, MASAHITO TAGAWA¹ (1.Kobe Univ., 2.Mechano Transformer Corp., 3.Kyushu Inst. of Tech.)

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