Atsushi Hiraiwa

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 7:00 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-C302-1~19] 13.7 Compound and power electron devices and process technology

1:45 PM - 2:00 PM

[18p-C302-1] Dynamic charging model of current conduction in atomic-layer-deposited Al₂O₃ films on GaN

〇Atsushi Hiraiwa^1,2, Satoshi Okubo³, Kiyotaka Horikawa³, Hiroshi Kawarada^1,3,4 (1.RONLI, Waseda Univ., 2.IMaSS, Nagoya Univ., 3.FSE, Waseda Univ., 4.KMLMST, Waseda Univ.)