Eiji Kojima

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 7:00 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-C302-1~19] 13.7 Compound and power electron devices and process technology

2:00 PM - 2:15 PM

△ [18p-C302-2] Theory of the Effect of incorporation nitrogen atoms in the Al₂O₃ gate dielectric

〇(M2)Eiji Kojima¹, Kenta Chokawa¹, Hiroki Shirakawa¹, Masaaki Araidai^1,2, Kenji Shiraishi^1,2 (1.Nagoya Univ., 2.IMaSS)