Manato Deki

→ Search for Manato Deki in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 7:00 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-C302-1~19] 13.7 Compound and power electron devices and process technology

2:15 PM - 2:30 PM

△ [18p-C302-3] GaN Surface Oxidation Effects to Electrical Property in ALD-Al₂O₃/ GaN Interface

〇Manato Deki¹, Kazushi Sone², Kentaro Nagamatsu¹, Atsushi Tanaka^1,3, Maki Kushimoto², Shugo Nitta¹, Yoshio Honda¹, Hiroshi Amano^1,4,5 (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.NIMS, 4.Univ. ARC, 5.Nagoya Univ. VBL)