Yoshihiro Koga

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 6:00 PM F206 (61-206)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[18p-F206-1~15] 6.2 Carbon-based thin films

5:30 PM - 5:45 PM

[18p-F206-14] A Study of Room-Temperature Bonding of SOI Wafer with Diamond-BOX Layer

〇Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)