Hiroki Morimura

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 6:30 PM G201 (63-201)

Special Symposium
| Special Symposium
| SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

[18p-G201-1~16] SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

5:30 PM - 5:45 PM

[18p-G201-13] Expectation of the integrated MEMS technology for LSI circuit design

〇Hiroki Morimura¹ (1.NTT Device Innovation Center, NTT Corporation)