Takahiro Yamasaki

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 4:00 PM - 6:00 PM P14 (P)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18p-P14-1~19] 15.6 Group IV Compound Semiconductors (SiC)

4:00 PM - 6:00 PM

[18p-P14-12] First-Principles Molecular Dynamics Simulations of O₂ Oxidation in 4H-SiC/SiO₂
~ Formation and Diffusion of C Clusters ~

〇Takahiro Yamasaki¹, Nobuo Tajima¹, Tomoaki Kaneko¹, Jun Nara¹, Tatsuo Schimizu², Koichi Kato³, Chioko Kaneta⁴, Takahisa Ohno¹ (1.NIMS, 2.Toshiba R&D Center, 3.IIS, Univ. of Tokyo, 4.FUJITSU Labs. Ltd.)