Toshiyuki Isshiki

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 4:00 PM - 6:00 PM P14 (P)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18p-P14-1~19] 15.6 Group IV Compound Semiconductors (SiC)

4:00 PM - 6:00 PM

[18p-P14-3] Observation of dislocations in 4H-SiC epitaxial wafer by mirror projection electron microscopy

〇Toshiyuki Isshiki¹, Takahiro Sato^1,2, Masaki Hasegawa², Kentaro Ohira², Kenji Kobayashi², Atsushi Miyaki², Katsunori Onuki² (1.Kyoto Inst. Tech., 2.Hitachi High-Tech)

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