Sawako Tanaka

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-C101-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:30 AM - 9:45 AM

[19a-C101-2] Chemical Kinetic Analysis for Temporal Variation of Fluorescence from Legionella

〇(B)Sawako Tanaka¹, Syuhei Onishi¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida², Kazuya Masu², Yasuhiko Nikaido³, Mitsumasa Saito³, Shinichi Yoshida⁴ (1.Toyohashi Univ. of Technology, 2.Tokyo Inst. of Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)

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