Shota Hirai

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:00 AM - 12:15 PM C104 (52-104)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[19a-C104-1~12] 6.1 Ferroelectric thin films

9:00 AM - 9:15 AM

[19a-C104-1] Fabrication of MEMS energy harvester based on multilayer PZT thin films

〇Shota Hirai¹, Kensuke Kanda¹, Sano Ryo¹, Fujita Takayuki¹, Maenaka Kazusuke¹ (1.Univ. Hyogo)