Ryota Miyano

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:15 PM - 6:45 PM A404 (54-404)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[19p-A404-1~19] 3.7 Laser processing

3:15 PM - 3:30 PM

△ [19p-A404-7] Formation of low-k nanoporous SiO₂ films by pulsed laser deposition

〇(B)Ryota Miyano¹, Toshihumi Kikuchi^1,2, Kaname Imokawa^1,2, Daisuke Nakamura¹, Hiroshi Ikenoue^1,2 (1.ISEE, Kyushu Univ., 2.Dept. of Gigaphoton, Kyushu Univ.)