MinGee Kim

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:15 PM - 6:30 PM C104 (52-104)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[19p-C104-1~19] 6.1 Ferroelectric thin films

2:00 PM - 2:15 PM

▼ [19p-C104-4] Si Substrate orientation Dependence of Ferroelectric HfO2 Properties Deposited by RF Magnetron Sputtering

〇(D)MinGee Kim¹, Shun-ichiro Ohmi¹ (1.Tokyo Tech.)