Yuta Yoshikawa

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[19p-C204-1~17] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:30 PM - 5:45 PM

△ [19p-C204-15] First-principles-based prediction of the local structures damaged by plasma exposures

〇Yuta Yoshikawa¹, Koji Eriguchi¹ (1.Kyoto Univ.)