Tetsuo Kawanabe

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[19p-C204-1~17] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

6:00 PM - 6:15 PM

[19p-C204-17] Improvement of Etching Process Distribution Controllability within a Wafer by Tuning Etching-byproduct Density Distribution

〇Tetsuo Kawanabe¹, Isao Mori¹, Motohiro Tanaka¹, Naoki Yasui¹ (1.HHT)