Kazunori Shinoda

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[19p-C204-1~17] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:30 PM - 2:45 PM

[19p-C204-4] Rapid Thermal Cyclic Atomic-Level Etching of Tungsten

〇Kazunori Shinoda¹, Yuko Hanaoka², Nobuya Miyoshi¹, Hiroyuki Kobayashi¹, Kohei Kawamura², Masaru Izawa², Kenji Ishikawa³, Masaru Hori³ (1.Hitachi R&D, 2.Hitachi High-Tech, 3.Nagoya Univ.)

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