Teppei Onuki

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 7:00 PM C303 (52-303)

Oral presentation
| 3 Optics and Photonics
| 3.8 Optical measurement, instrumentation, and sensor

[19p-C303-1~19] 3.8 Optical measurement, instrumentation, and sensor

3:30 PM - 3:45 PM

[19p-C303-7] Inspections of surface integrity of sapphire in wafer fabrication

〇Teppei Onuki¹, Ke Wu¹, Nao Sugano¹, Hirotaka Ojima¹, Jun Shimizu¹, Libo Zhou¹ (1.Ibaraki Univ.)