Nobutaka Miyauchi

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 4:00 PM - 6:00 PM P11 (P)

Poster presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 6:00 PM

[19p-P11-13] Dry etching for ε-Ga₂O₃ thin films grown on GaN template

〇Nobutaka Miyauchi¹, Masayuki Nakamura², Takayuki Kobayashi², Hiroyuki Nishinaka¹, Daisuke Tahara¹, Shota Morimoto¹, Shin-ichi Motoyama², Masahiro Yoshimoto¹ (1.Kyoto Inst. of Tech, 2.SAMCO Inc.)