Takayuki Uchida

→ Search for Takayuki Uchida in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 19, 2018 4:00 PM - 6:00 PM P11 (P)

Poster presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 6:00 PM

[19p-P11-8] Growth of α-Ga₂O₃ thin films by O₃ assisted mist CVD

〇Takayuki Uchida¹, Kentaro Kaneko¹, Shizuo Fujita¹ (1.Graduate School of Eng., Kyoto Univ.)