Shota Ikeda

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[20a-B403-1~10] 7.5 Ion beams

9:30 AM - 9:45 AM

[20a-B403-3] Surface activated bonding with low-damege processing using gas cluster ion beam

〇(M1)Shota Ikeda¹, Noriaki Toyoda¹ (1.Hyogo Univ.)