Toshio Seki

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[20a-B403-1~10] 7.5 Ion beams

10:30 AM - 10:45 AM

[20a-B403-6] Fabrication of 3D structure by double-angled etching with reactive gas cluster injection

〇Toshio Seki¹, Hiroki Yamamoto², Takahiro Kozawa³, Tadashi Syojo⁴, Kunihiko Koike⁴, Takaaki Aoki⁵, Jiro Matsuo¹ (1.Graduate School of Engineering, Kyoto Univ., 2.QST, 3.ISIR Osaka Univ., 4.Iwatani Corp., 5.ACCMS, Kyoto Univ.)

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