Kazuma Ohki

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:45 AM - 10:00 AM

[20a-C204-4] Simulation of Non-Equilibrium Atmospheric Pressure Hydrocarbon Plasmas for Carbon Materials Fabrication

〇(M2)Kazuma Ohki¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba Inst. Technol., 2.Meijo Univ., 3.Gifu Univ.)