3:45 PM - 4:00 PM △ [20p-D103-10] Fabrication of normally-off n-JFETs and p-JFETs on a semi-insulating SiC substrate by ion implantation 〇Masashi Nakajima1, Mitsuaki Kaneko1, Tsunenobu Kimoto1 (1.Kyoto Univ.)