Hironori Takeda

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:15 PM - 5:00 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20p-D103-1~14] 15.6 Group IV Compound Semiconductors (SiC)

2:30 PM - 2:45 PM

△ [20p-D103-6] Al ion implantation into n⁺-channel SiC junctionless MOSFET for evaluating the impact of Al atoms on channel mobility

〇Hironori Takeda¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ.)