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Maskless Exposure Equipment, Surface-Activated Equipment

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Wave optical simulation software VirtualLab, Multiphysics analysis software OOFELIE

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Excimer, UV- LED, UV laser

EUV/X-ray detectors, EUV/X-ray optics, ceramic tubes

Black Phosphide

RHEED Gun & Power Supply, Analytical RHEED System, in-situ Wafer Temp Sensor, UHV Evaporator, Vacuum Gauge, etc.

TBD

X-ray Diffractometer, 2D Hybrid Pixel Array Detector, Thermal Analyzer

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UHV Micro Manipulator & Chamber (Installed Cooling & Heating System)

cryostat, piezo positioner, interferometric displacement sensor

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Surface treatment for powder by atmospheric plasma. Making Powder in requidde! Also making filmon requid.

TBD

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Table Top Sputtering System SC-701Mk2ADVANCE　Mini Programmable Sputtering System SC-701HMC2, Vacuum Evaporator SVC-700TMSG/7PS80

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