Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
Tue. Mar 20, 2018 2:00 PM - 4:15 PM B303 (53-303)
Tadahiro Kawasaki(JFCC), Mitsunori Kitta(AIST)
△：奨励賞エントリー
▲：英語発表
▼：奨励賞エントリーかつ英語発表
空欄：どちらもなし
2:00 PM - 2:15 PM
〇Yuki Sasaki1, Tadahiro Kawasaki1 (1.JFCC)
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2:15 PM - 2:30 PM
〇(M1)Samuel Jeong1, Yu Kikuchi1, Yoshikazu Ito1, Jun-ichi Fujita1 (1.Univ. Tsukuba)
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2:30 PM - 2:45 PM
〇(B)Yu Kikuchi1, Samuel Jeong1, Yoshikazu Ito1, Jun-ichi Fujita1 (1.Tsukuba Univ.)
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2:45 PM - 3:00 PM
〇Tadahiro Kawasaki1, Ryuji Yoshida1, Takeharu Kato1, Shunichi Motomura2, Tsunenori Nomaguchi2, Toshihide Agemura2, Masahiro Tomita3, Takashi Ikuta4 (1.JFCC, 2.Hitachi High-Tech., 3.Vac. Device, 4.OECU)
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3:15 PM - 3:30 PM
〇Konomi Ikita1, Noboru Taguchi2, Akihiro Tanaka1, Riki Kataoka2, Yasushi Maeda2, Shingo Tanaka2, Masahide Shima1, Kenichi Tsutsumi1 (1.JEOL Ltd., 2.AIST)
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3:30 PM - 3:45 PM
〇Makoto Kuwahara1,2, Hidefumi Asano2, Toru Ujihara1,2, Nobuo Tanaka1, Koh Saitoh1,2 (1.IMaSS, Nagoya Univ., 2.Dept. Eng., Nagoya Univ.)
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3:45 PM - 4:00 PM
〇Yoshihiro Midoh1, Koji Nakamae1 (1.Osaka Univ.)
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4:00 PM - 4:15 PM
〇Mitsunori Kitta1, Shingo Tanaka1 (1.AIST)
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