Tadahiro Kawasaki

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 2:00 PM - 4:15 PM B303 (53-303)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[20p-B303-1~8] 7.2 Applications and technologies of electron beams

2:45 PM - 3:00 PM

[20p-B303-4] Development of electrostatic Cs-corrector for SEM using annular and circular electrodes

〇Tadahiro Kawasaki¹, Ryuji Yoshida¹, Takeharu Kato¹, Shunichi Motomura², Tsunenori Nomaguchi², Toshihide Agemura², Masahiro Tomita³, Takashi Ikuta⁴ (1.JFCC, 2.Hitachi High-Tech., 3.Vac. Device, 4.OECU)

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