2:45 PM - 3:00 PM
[20p-B303-4] Development of electrostatic Cs-corrector for SEM using annular and circular electrodes
Keywords:Aberration correction, SEM
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
Tue. Mar 20, 2018 2:00 PM - 4:15 PM B303 (53-303)
Tadahiro Kawasaki(JFCC), Mitsunori Kitta(AIST)
2:45 PM - 3:00 PM
Keywords:Aberration correction, SEM