Symposium (Oral)

[18p-A404-1~12] Progress in studies on mterial conversion and processing with high-power lasers

Sun. Mar 18, 2018 1:15 PM - 6:00 PM A404 (54-404)

Yoichiroh Hosokawa(NAIST), Masaaki Sakakura(Univ. of Southampton), Masayuki Kakehata(AIST)

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1:15 PM - 1:45 PM

[18p-A404-1] Development of new function creation and additive manufacturing technologies with high intensity lasers

〇Masahiro Tsukamoto¹ (1.JWRI,Osaka Univ.)

1:45 PM - 2:00 PM

[18p-A404-2] Titanium plate fabricated by sputter-less selective laser melting

〇Yuji Sato¹, Masahiro Tsukamoto¹, Takahisa Shobu², Shuto Yamagata¹, Ritsuko Higashino¹, Takaya Nishi³, Yorihiro Yamashita⁴, Hitoshi Nakano³, Nobuyuki Abe¹ (1.JWRI,Osaka Univ., 2.JAEA, 3.Kindai Univ., 4.IRII)

2:00 PM - 2:30 PM

[18p-A404-3] Surface Ablation by Soft X-ray Laser Pulse for EUV nano-scale fabrication

〇Masaharu Nishikino¹, Masahiko Ishino¹, Dinh T-H¹, Noboru Hasegawa¹, Faenov A², Pikuz T², Satoshi Ichimaru³, Hiroo Kinoshita⁴, Kazuyuki Sakaue⁵, Takeshi Higashiguchi⁶, Yuichi Inubushi⁷, Akira Kon⁷, Shigeki Owada⁸, Tadashi Hatano⁹, Masakazu Washio⁵, Toru Suemoto¹⁰, Tetsuya Kawachi¹ (1.QST, 2.Osaka Univ., 3.NTT-AT, 4.Univ. Hyogo, 5.Waseda Univ., 6.Utsunomiya Univ., 7.JASRI, 8.Riken, 9.Tohoku Univ., 10.TPCRI)

2:30 PM - 2:45 PM

[18p-A404-4] Material processing by laser driven high power pulsed EUV radiation with improved debris mitigation

〇(PC)Nozomi Tanaka¹, Nao Wada¹, Yasuyuki Kageyama², Hiroaki Nishimura¹ (1.ILE, Osaka Univ., 2.TOYOTA CRDL, INC.)

3:00 PM - 3:30 PM

[18p-A404-5] High Power LPP-EUV Source with Long Collector Mirror Lifetime
for High Volume Semiconductor Manufacturing

〇Hakaru Mizoguchi¹, Takashi Saitou¹, Taku Yamazaki¹ (1.Gigaphoton Inc.)

3:30 PM - 4:00 PM

[18p-A404-6] THz waves generation by intense laser and its application to material processing

〇Masaki Hashida^1,2 (1.Kyoto Univ. ICR, 2.Kyoto Univ. GSS)

4:00 PM - 4:15 PM

[18p-A404-7] Cutting of carbon fiber reinforced plastic (CFRP) by a cylindrically polarized pulsed CO₂ laser

〇Yukinori Adachi¹, Yusuke Hosaka¹, Yuki Iwamoto¹, Masamori Endo¹ (1.Tokai Univ.)

4:30 PM - 5:00 PM

[18p-A404-8] Study on matter/material in extreme conditions using high-power laser and X-ray free electron laser

〇Norimasa Ozaki¹ (1.Osaka Univ.)

5:00 PM - 5:15 PM

[18p-A404-9] Stress evaluation in femtosecond laser irradiation to GaN

〇Kenzo Goto¹, Reina Miyagawa¹, Osamu Eryu¹ (1.Nagoya Inst. of Tech.)

5:15 PM - 5:30 PM

[18p-A404-10] Through-hole processing using ring-shaped femtosecond laser

〇Satoshi Hasegawa¹, Yoshio Hayasaki¹ (1.CORE, Utsunomiya Univ.)

5:30 PM - 5:45 PM

[18p-A404-11] Geometrical effects of laser parameters on femtosecond laser ablation

〇Keiichi Bamoto¹, Yutsuki Aoyagi¹, Shuntaro Tani¹, Yohei Kobayashi¹ (1.ISSP, Univ. Tokyo)

5:45 PM - 6:00 PM

[18p-A404-12] Pulse-by-pulse depth profile measurement during multiple femtosecond laser irradiation

〇Shuntaro Tani¹, Yohei Kobayashi¹ (1.ISSP, Univ. Tokyo)

Sessions

Symposium » Progress in studies on mterial conversion and processing with high-power lasers