The 65h JSAP Spring Meeting, 2018

Masaharu Nishikino

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 6:00 PM A404 (54-404)

  • Symposium (Oral)
  • | Symposium
  • | Progress in studies on mterial conversion and processing with high-power lasers

[18p-A404-1~12] Progress in studies on mterial conversion and processing with high-power lasers

2:00 PM - 2:30 PM

[18p-A404-3] Surface Ablation by Soft X-ray Laser Pulse for EUV nano-scale fabrication

〇Masaharu Nishikino1, Masahiko Ishino1, Dinh T-H1, Noboru Hasegawa1, Faenov A2, Pikuz T2, Satoshi Ichimaru3, Hiroo Kinoshita4, Kazuyuki Sakaue5, Takeshi Higashiguchi6, Yuichi Inubushi7, Akira Kon7, Shigeki Owada8, Tadashi Hatano9, Masakazu Washio5, Toru Suemoto10, Tetsuya Kawachi1 (1.QST, 2.Osaka Univ., 3.NTT-AT, 4.Univ. Hyogo, 5.Waseda Univ., 6.Utsunomiya Univ., 7.JASRI, 8.Riken, 9.Tohoku Univ., 10.TPCRI)