[17a-B203-1~10] 3.13 Semiconductor optical devices

△ [17a-B203-2] Design of Membrane Structure Photodiode with Distributed Reflector

〇(M1)Jyo Tei¹, Zhichen Gu¹, Tomohiro Amemiya^1,2, Nobuhiko Nishiyama^1,2, Shigehisa Arai^1,2 (1.Tokyo Tech., 2.FIRST.)

Keywords:semiconductor, optical interconnect, photodiode

In recent years, replacement from electrical wiring to on-chip optical wiring has attracted attention because of problems such as RC delay and heat generation in global wiring of LSI. In order to solve these problems, we have proposed a technique to hybrid-mount a thin-film optical integrated circuit on an LSI, and as a photoreceiver to be used there, "GaInAs thin film pin photodiode (PD)" which can simultaneously realize high speed and high sensitivity.