[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-8] Effect of Overlapped Scan on CLC (100) Crystal Growth

Nobuo Sasaki^1,2, 〇(M2)muhammad arif razali², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)

Keywords:CLC, Laser Crystallization, Poly-Si, TFT

In the CLC crystallization having the (100) textures, the effect of cross scan was investigated. Grain boundary generation at the cross point was observed.