[17a-C202-1~7] 17.2 Graphene

[17a-C202-4] A new interface of graphene/SiC in Ar/trace amount of C₂H₄ gas mixture
~application to large area graphene exfoliation and transfer~

〇Takashi Kajiwara¹, Hiroaki Katsuki¹, Wataru Sato¹, Anton Visikovskiy¹, Tetsuro Shirasawa³, Takushi Iimori², Fumio Komori², Satoru Tanaka¹ (1.Kyushu Univ., 2.The Univ. of Tokyo, 3.AIST)

Keywords:Graphene, exfoliation, SiC