[17a-F202-1~11] 7.4 量子ビーム界面構造計測

[17a-F202-9] Dispersive X-ray scattering measurements for time-resolved observation of thin films

〇Wolfgang Voegeli¹、Etsuo Arakawa¹、Toshio Takahashi¹、Tetsuroh Shirasawa^2,3、Hiroo Tajiri⁴、Masamitu Takahasi⁵、Takuo Sasaki⁵、Tadashi Matsushita⁶ (1.Tokyo Gakugei Univ.、2.AIST、3.JST-PRESTO、4.JASRI/SPring-8、5.QST、6.KEK-PF)

キーワード：X-ray scattering, time-resolved measurement

A recently developed method for time-resolved measurements of X-ray reflectivity, CTR scattering and reciprocal space mapping will be presented, which uses monochromatic synchrotron radiation from 3rd generation undulator sources. It makes time-resolved observations with a time resolution down to 10 ms possible. The principle of the method and results of test experiments will be presented.