[17p-A402-1~18] 3.12 Nanoscale optical science and near-field optics

[17p-A402-11] Optical Properties of Plasmonic Array Composed of Conductive Nitride Nanoparticle and Photoluminescence Enhancement in the Visible

〇Shunsuke Murai^1,2, Ryosuke Kamakura¹, Koji Fujita¹, Katsuhisa Tanaka¹ (1.Kyoto Univ., 2.JST-PRESTO)

Keywords:Conductive nitride, Plasmonics, Visible photoluminescence enhancement

Titanium nitride(TiN) and zirconium nitride (ZrN) thin films were structured to square arrays of nanoparticles by using nanoimprint lithography and reactive ion etching. The arrays support the coupling between the surface plasmon resonance (SPR) and in–plane light diffraction in the visible region. When the arrays are combined with the light emitting layer containing rhodamine 6G, the photoluminescence from the layer is enhanced as high as 9.7 times owing to the combined effect of SPR and light diffraction.