3:30 PM - 3:45 PM
[17p-C103-5] Low temperature fabrication and step coverage of hafnium oxide thin films by supercritical fluid deposition
Keywords:Thin film, Supercritical fluid, Hafnium oxide
Presentation information
Oral presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
[17p-C103-1~13] 6.4 Thin films and New materials
Sat. Mar 17, 2018 1:45 PM - 6:00 PM C103 (52-103)
Yoshinobu Nakamura(Univ. of Tokyo), Motofumi Suzuki(Kyoto Univ)