Hiroaki Kawashima

→ Search for Hiroaki Kawashima in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:45 PM - 6:00 PM C103 (52-103)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[17p-C103-1~13] 6.4 Thin films and New materials

3:30 PM - 3:45 PM

[17p-C103-5] Low temperature fabrication and step coverage of hafnium oxide thin films by supercritical fluid deposition

〇Hiroaki Kawashima¹, Hiroshi Uchida¹ (1.Sophia Univ.)