[17p-C204-1~20] 8.1 Plasma production and diagnostics

△ [17p-C204-5] OES Measurement of Electron Temperature of Non-equilibrium Atmospheric-pressure Ar Plasma

〇(B)Yoshiro Hakozaki¹, Hiroshi Onishi¹, Atsushi Nezu², Hiroshi Akatsuka² (1.Tokyo Tech., 2.IIR Tokyo Tech.)

Keywords:atmospheric-pressure plasma, OES measurement, electron temperature

There are few reports of measurements of the electron temperature (T_e) of atmospheric-pressure non-equilibrium plasma. Therefore, we tried to measure T_e of the atmospheric-pressure Ar non-equilibrium plasma by OES measurement of continuum spectra and by CR model interpretation of the line spectral intensity. As a result, we found that the excitation temperature of 4p-5p to be 3500-4100 K, and the resultant T_e deduced from the CR model calculation to be about 0.5-0.8 eV. This value almost agreed with the one estimated from the continuum spectra.